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gasbanor sf6 n2 N2Mixtures in Burundi

gasbanor sf6 n2 N2Mixtures in Burundi

gasbanor sf6 n2 N2Mixtures in BurundiPure fluorine gas performs better than other fluorine gases such as ClF3, NF3, SF6, and F2/N2 mixtures, since inactive components of these gases can compromise the cleaning performance. Fluorine is very effective for dry chamber cleaning. Pure fluorine gas has productivity gains relative to CVD tools, high cleaning performance, and shorter

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